Coverage of different detection wavelength ranges for emission analysis and thermal analysis allows easy selection of an analysis technique that matches the sample and failure mode.
Working range of optical stage
| X | 60 mm |
|---|---|
| Y | 60mm |
| Z | 20 mm |
* Working range might be narrower than these values due to the prober being used and interference with the sample stage or mounting of a NanoLens.
* The actual display may differ depending on your software version, environment, etc.
The iPHEMOS-MPX superimposes the emission image on a high-resolution pattern image to localize defect points quickly.
The contrast enhancement function makes an image clearer and more detailed.
Display function
As devices become more complicated, there is increased demand for analysis under an LSI tester connection to find a failure occurring at a specific point while a device is functioning. It is possible to connect an LSI tester with the iPHEMOS-MPX by a short cable and using a probe card adapter specifically designed for the analysis under the iPHEMOS-MPX optics.
Handheld water quality meter that measure pH, conductivity, resistivity, salinity and TDS. Waterproof, dust proof, eco-friendly, shock and scratch resistant and built for hands-free testing.
LI-830 CO2 and LI-850 CO2/H2O Analyzers: For continuous measurements
The “Thermal F1” is the next generation in thermal emission microscopy. Completely redesigned from the ground up by the same engineers responsible for the PHEMOS, the F1 features an automated microscope stage, best-in-class sensitivity…
The Hitachi NP6800 is a SEM-based dedicated probing system designed to meet the analytical needs of the 10-nm design node semiconductor device and beyond.
The QuickTrace® M-8000 Cold Vapor Atomic Fluorescence (CVAF) Mercury Analyzer is ideal for ultra-trace to sub-mg/L mercury quantitation. It easily achieves the ultra-trace mercury detection limit of < 0.05 ng/L demanded by customers employing EPA method 1631.
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