The PHEMOS-1000 is a standard model high-resolution emission microscope that includes an IR confocal laser scan microscope. From a socket board to a 300 mm double-sided wafer prober, the PHEMOS-1000 flexibly corresponds to device environment and set-up. It can also accommodate the highly sensitive NIR camera and the high-resolution NanoLens as options. There are various options including IR-OBIRCH analysis, connection to an LSI tester and the CAD navigation function, all of which give the PHEMOS-1000 the ability to handle a wide range of measuring needs.
Dark box illumination lamp contains mercury, dispose according to local, state or federal laws.
● NanoLens for high-resolution, high-sensitivity observation (option)
● Dynamic analysis function by laser radiation (option)
● EO probing unit C12323-01 (option)
● High-sensitivity NIR camera for low-voltage samples (option)
● Digital lock-in kit to enhance the IR-OBIRCH detectability (option)
● 300 mm double-sided semi-auto prober installable
Superimposed display/contrast enhancement function
The PHEMOS-1000 superimposes the emission image on a high-resolution pattern image to localize defect points quickly. The contrast enhancement function makes an image clearer and more detailed.
Comments, arrows, and other indicators can be displayed on an image at any location desired.
• Scale display
The scale width can be displayed on the image using segments.
• Grid display
Vertical and horizontal grid lines can be displayed on the image.
• Thumbnail display
Images can be stored and recalled as thumbnails, and image information such as stage coordinates can be displayed.
• Split screen display
Pattern images, emission images, superimposed images, and reference images can be displayed in a 4-window screen at once.