With optimized electron optical systems, the new Regulus series features resolutions down to 0.7 nm in the Regulus8220/8230/8240 models and 0.8 nm in the Regulus8100 model.
Specimen: Gold particle on Carbon
Landing voltage: 10 V
Specimen: Catalyst
Accelerating voltage: 30 kV
Specimen: Tin ball
Landing voltage: 1.5 kV
| Regulus 8100 | Regulus 8220 | Regulus 8230 | Regulus 8240 | ||||
|---|---|---|---|---|---|---|---|
| Secondary Electron Resolution | 0.7 nm (Vacc: 15 kV) 0.8 nm (Landing voltage: 1 kV)*3 |
0.6 nm (Vacc: 15 kV) 0.7 nm (Landing voltage: 1 kV)*3 |
|||||
| Accelerating voltage | 0.5~30 kV | 0.5~30 kV | |||||
| Landing voltage*3 | 0.1~2 kV | 0.01~20 kV | |||||
| Mag. | 20~1,000,000 ×*4 | 20~2,000,000 ×*4 | |||||
| Specimen stage | Stage control | 3-axis motor drive*5 | 5-axis motor drive | ||||
| Movable range | X | 0~50 mm | 0~50 mm | 0~110 mm | 0~110 mm | ||
| Y | 0~50 mm | 0~50 mm | 0~110 mm | 0~80 mm | |||
| R | 360° | ||||||
| T | -5~70° | ||||||
| Z | 1.5~30 mm | 1.5~40 mm | |||||
| Stage repeatability | – | – | – | Less than ±0.5 µm | |||
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