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NX2000​

Focused Ion and Electron Beam System & Triple Beam System​

Category: Failure Analysis, Material Characterization and Metrology

Toward the ultimate TEM sample preparation system

FIB-SEM systems have become an indispensable tool for characterization and analysis of the latest technologies and high performance nano-scale materials. An ever-increasing demand for ultrathin TEM lamellas without artifacts during FIB processing require the best in ion and electron optics technologies.​

 

Tags: Hitachi (FIB-SEM) Focused Ion and Electron Beam System & Triple Beam System​ NX2000 ​Sigmatech Inc. Philippines
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Triple-Beam FIB-SEM NX2000

Hitachi’s NX2000 high performance FIB and high resolution SEM system with its unique sample orientation control* and triple beam* technologies, supports high throughput, and high quality TEM sample preparation for cutting edge applications.
* Option

High contrast, real-time SEM end point detection allows ultrathin TEM sample preparation of sub 20 nm devices.

Real-time SEM monitoring during FIB milling
Sample: NAND flash memory
Accelerating voltage: 1 kV
FOV: 0.6 µm

Micro sampling* and high precision positioning mechanism* enable sample orientation control for Anti-Curtaining Effects (ACE function) and uniformly-thick lamellas.


With sample orientation control


Without sample orientation control

Triple Beam system* Triple beam configuration for Ga FIB-induced damage reduction.

EB: Electron Beam
FIB: Focused Ion Beam
Ar: Argon ion beam

Specifications

FIB column
Resolution (SIM) 4 nm @ 30kV, 60 nm @ 2kV
Acceleration voltage 0.5 kV – 30 kV
Beam current 0.05 pA – 100 nA
FE-SEM column
Resolution 2.8 nm @ 5kV, 3.5 nm @ 1kV
Acceleration voltage 0.5 kV – 30 kV
Electron source Cold cathode field emission source
Detector
Standard detector Upper/Lower SED & BSED
Stage X: 0 – 205 mm
Y: 0 – 205 mm
Z: 0 – 10 mm
R: 0 – 360° infinite
T: -5 – 60°

See more on Hitachi’s website

 

Sigmatech Inc. Philippines is the leading provider of cutting-edge laboratory equipment crucial for a wide range of applications, including Quality Assurance/Quality Control (QA/QC), Metrology, Research and Development (R&D), Failure Analysis, Environmental and Chemical Analysis, and Process Control. Serving diverse industries in the Philippines, such as Semiconductor/Electronics, Pharmaceutical, Mining, Energy, and more, we are your go-to source for top-quality equipment, including Electron Microscopes in the Philippines. About us

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