The design concept was to create an easy-to-use probing system (like an optical probing system) while maintaining this same ease of operation even under the vacuum environment through our intuitive probe operation design.
14nm SRAM image
Accelerating voltage: 0.5kV
Cross section image
This dedicated nano-probing system was co-developed with a number of semiconductor manufacturing companies for
Fully controllable GUI
Top-down CCD camera image for optimizing the position of probes to the specimen in the X and Y axes
Side-view CCD camera image for optimizing the position of probes to the specimen in the Z axis
EBAC image of a multi-layer circuit Accelerating voltage: 20kV
High-quality and high-resolution image for high-precision probe positioning
| Applicable device technology node | 7 nm node device | |
|---|---|---|
| Probe unit | Number of probe | 8 |
| Driving method | Piezoelectric | |
| Fine stroke range | 5 µm (X,Y) | |
| Coarse stroke range | 3 mm (X), 5 mm (Y) | |
| Specimen stage / Base stage |
Specimen size | 15 mm x 15 mm or smaller (1 mm thick or less) |
| Traverse position | Measurement / Specimen exchange / Probe exchange | |
| Specimen / probe exchange |
Air-lock exchange chamber equipped | |
| Probe navigation | Stage traverse to probe position Measurement position memory |
|
| Probe coarse adjustment | ||
| Probe coarse adjustment | CCD image display | Top-down and side image displays |
| Electron optics | Electron gun | Cold field emission electron source |
| Accelerating voltage | 0.5 kV to 30 kV | |
| Image shift | ±75 µm (at Vacc=1.0 kV, WD=5 mm) | |
| EBAC amplifier / Image display |
Amplifier type | Current amplifier / Differential amplifier |
| Image display | SEM / EBAC (Single / Parallel / Overlay) | |
| Image processing | Black and white reversal display, color display, brightness adjustment, slow scan integration, belt scan | |
| Dimensions and Weight | 1,190(W) × 1,377(D) × 1,800(H)(mm), 990 kg |
|---|---|
| Display Unit | 1,000(W) × 1,004(D) × 1,200(H)(mm), 265 kg |
| EBAC unit | 600(W) × 1,000(D) × 1,760(H)(mm), 150 kg |
| Room temperature | 15～25°C |
|---|---|
| Humidity | 60% RH or less |
| Power | AC100 V±10% 5 kVA (M5 crimp terminal) |
| Grounding | 100Ω or less |
Ids-Vgs characteristics of 14nm SoC SRAM
SEM image of SNM measurements with eight probes
SNM characteristics of a 22nm SoC SRAM
Ids-Vgs characteristics of a 45nm SoC SRAM
Output signal from a single transistor obtained after pulse input
Measure evaporation residue in aviation fuels, motor gasolines, and other volatile distillates in accordance with ASTM D 381, ISO 6246, EN 5 and IP 131 test methods. The Herzog HGT 915 uses air evaporation, while the Herzog HGT 917 offers the versatility of either air or steam evaporation.
The Model 520 PB is also suitable for laboratories, the pharmaceutical, food, light and consumer goods industries as well as production or for pharmacies and jewellery.
QuickSpec provides a broad analysis range of ethanol from 0.1 vol% to 100.0 vol%, which is crucial for ethanol blending in gasoline and for measuring purity of fuel-grade ethanol.
Herzog’s automated Ubbelohde viscometers offer stability, ease of use, repeatability, and high sample throughput.
You may contact our specialists by accomplishing form below.
You may contact our specialists by accomplishing form below.
