hitachi high tech

NP6800​

Nanoscale Device Characteristics Analysis System Nano-Prober​

The Hitachi NP6800 is a SEM-based dedicated probing system designed to meet the analytical needs of the 10-nm design node semiconductor device and beyond. The precision piezoelectric-driven actuator is equipped with X, Y and Z axes probe movements allowing the probes to be controlled very precisely for measuring the electrical characteristics of a single MOS transistor.

The design concept was to create an easy-to-use probing system (like an optical probing system) while maintaining this same ease of operation even under the vacuum environment through our intuitive probe operation design.​

 

Tags: Nano-Prober​ NP6800​ SEM Probing System ​Sigmatech Inc. Philippines

Overview

  • This SEM-based probing system is used for analyzing defects and failures that can develop during the manufacturing process of any nanoscale semiconductor devices.
  • The NP6800 Nano-Prober employs an optimized cold field-emission electron source, an eight-prober system, a temperature-controlled stage from -40 F to 302 F (-40 deg. to 150 deg.), an AC measurement system (optional) for gate-resistance detection, an EBAC system for short and open failure localization, and probe and specimen exchange units for the highest throughput.
  • The NP6800 Nano-Prober was developed as a dedicated nano-probing system for not only high-throughput operation, but also the high-stability measurements of nano-scale semiconductor devices. The system is capable of evaluating electrical characteristics, EBAC, EBIC, pulse IV, and the temperature requirements of nanoscale devices.

14nm SRAM image Accelerating voltage: 0.5kV
14nm SRAM image
Accelerating voltage: 0.5kV

Cross section image
Cross section image

Features

This dedicated nano-probing system was co-developed with a number of semiconductor manufacturing companies for

  • Improved probe stability and current for increased S/N and EBAC performance
  • Increased electrical image shift to ±75 µm
  • Eight-probe handling system
  • Specimen-temperature controllable stage (-40°C to 150°C)
  • CCD camera for both top-down and side views to assist with smoother probing
  • A high-precision specimen stage for improved positioning accuracy
  • An in-situ probe exchange system
  • Electron Beam Absorbed Current (EBAC) function
  • Voltage-applied EBAC function (Dynamic Induced EBAC “DI-EBAC”) (Optional)
  • Pulsed IV measurement for diagnosing resistive gate electrode defects (Optional)

User-Friendly Interface

Fully controllable GUI
Fully controllable GUI

User-Friendly Design

Top-down CCD camera image for optimizing the position of probes to the specimen in the X and Y axes
Top-down CCD camera image for optimizing the position of probes to the specimen in the X and Y axes

Side-view CCD camera image for optimizing the position of probes to the specimen in the Z axis
Side-view CCD camera image for optimizing the position of probes to the specimen in the Z axis

Premium Image Quality

EBAC image of a multi-layer circuit Accelerating voltage: 20kV
EBAC image of a multi-layer circuit Accelerating voltage: 20kV

High-Resolution and High-Quality Imaging Performance

High-quality and high-resolution image for high-precision probe positioning
High-quality and high-resolution image for high-precision probe positioning

Specifications

Applicable device technology node 7 nm node device
Probe unit Number of probe 8
Driving method Piezoelectric
Fine stroke range 5 µm (X,Y)
Coarse stroke range 3 mm (X), 5 mm (Y)
Specimen stage /
Base stage
Specimen size 15 mm x 15 mm or smaller (1 mm thick or less)
Traverse position Measurement / Specimen exchange / Probe exchange
Specimen /
probe exchange
Air-lock exchange chamber equipped
Probe navigation Stage traverse to probe position
Measurement position memory
Probe coarse adjustment
Probe coarse adjustment CCD image display Top-down and side image displays
Electron optics Electron gun Cold field emission electron source
Accelerating voltage 0.5 kV to 30 kV
Image shift ±75 µm (at Vacc=1.0 kV, WD=5 mm)
EBAC amplifier /
Image display
Amplifier type Current amplifier / Differential amplifier
Image display SEM / EBAC (Single / Parallel / Overlay)
Image processing Black and white reversal display, color display, brightness adjustment, slow scan integration, belt scan

Dimensions and Weight

Dimensions and Weight 1,190(W) × 1,377(D) × 1,800(H)(mm), 990 kg
Display Unit 1,000(W) × 1,004(D) × 1,200(H)(mm), 265 kg
EBAC unit 600(W) × 1,000(D) × 1,760(H)(mm), 150 kg

Utility requirement

Room temperature 15~25°C
Humidity 60% RH or less
Power AC100 V±10% 5 kVA (M5 crimp terminal)
Grounding 100Ω or less

Application Data

Electrical evaluation results of a 14nm SoC SRAM

Ids-Vgs characteristics of 14nm SoC SRAM
Ids-Vgs characteristics of 14nm SoC SRAM

Static Noise Margin evaluation results of a 22 nm SoC SRAM

SEM image of SNM measurements with eight probes
SEM image of SNM measurements with eight probes

SNM characteristics of a 22nm SoC SRAM
SNM characteristics of a 22nm SoC SRAM

Temperature measurements taken with the heating and cooling stages from -40°C to 150°C.

Ids-Vgs characteristics of a 45nm SoC SRAM
Ids-Vgs characteristics of a 45nm SoC SRAM

Pulse IV measurement (Optional)

Output signal from a single transistor obtained after pulse input
Output signal from a single transistor obtained after pulse input

EBAC analysis of a Cu Via-chain test pattern with high resistance

EBAC analysis of a Cu Via-chain test pattern with high resistance

Voltage-applied EBAC (Dynamic Induced EBAC named DI-EBAC) analysis of MOS transistor with gate leakage

Voltage-applied EBAC (Dynamic Induced EBAC named DI-EBAC) analysis of MOS transistor with gate leakage

See more

 

Sigmatech Inc. Philippines is the leading provider of cutting-edge laboratory equipment crucial for a wide range of applications, including Quality Assurance/Quality Control (QA/QC), Metrology, Research and Development (R&D), Failure Analysis, Environmental and Chemical Analysis, and Process Control. Serving diverse industries in the Philippines, such as Semiconductor/Electronics, Pharmaceutical, Mining, Energy, and more, we are your go-to source for top-quality equipment, including Ratio Beam Spectrophotometers in the Philippines. About us

About us

Other Products

Seiwa Optical Modus Mono Digital Microscope

Seiwa Optical Modus Mono Digital Microscope

Digital Microscope – Integrated fully motorized digital microscope with 12x optical zoom. Included Seiwa InSight software provides features for high precision measurements, documentation and traceable report generation as required by industrial, scientific and biomedical applications.

Learn More ➤

HOW CAN WE HELP?

You may contact our specialists by accomplishing form below.

Request Quote

You may contact our specialists by accomplishing form below.