ULVAC-PHI 710 Auger Electron Spectrometer
PHI 710 scanning Auger electron spectrometer is the only AES instrument in the world that specified < 8 nm of Auger spatial resolution.
Fusion® is an innovative, high-speed, multisensor measurement system with 3D capability that combines an exceptional large field-of-view (LFOV) optical system with multisensor flexibility to form a uniquely productive metrology system.
The heart of Fusion’s capability lies in its telecentric large field optics. Fusion’s dual optical magnifications: low with 100 mm viewing area and high for small feature measurements and autofocus — each telecentric for image accuracy throughout the depth of field. Advanced design principles and FOV non-linear calibration allow Fusion to measure many features in a Large FOV with the same accuracy as a small FOV on a traditional video measurement system. Large field optics allow a wide area to be imaged with high accuracy, while feature extraction can instantly process and identify all features and dimensions within the scene with no need for a pre-programmed measurement routine.
BENEFIT |
FEATURE |
|---|---|
| High Productivity | 100mm FOV combined with a high-speed transport delivers fast measurement throughput |
| 3D Capability | Powered by ZONE3 metrology software, Fusion allows for 3D and CAD-based measurement with all sensors |
| Multisensor capability over the full stage travel | All sensors are placed precisely on the optical centerline by the patented rotational deployment mechanism |
| Intelligent Image Processing | Full field image processing and high-speed cameras allow entire scenes to be measured instantly |
Innovative Large Field-of-View 3D Multisensor System
Innovative Large Field-of-View 3D Multisensor System with an expansive measuring volume
PHI 710 scanning Auger electron spectrometer is the only AES instrument in the world that specified < 8 nm of Auger spatial resolution.
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