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K850WM

Large Chamber Critical Point Dryer

The K850WM Critical Point Dryer is a compact, bench-top instrument designed to critical point dry a complete 6″/150 mm wafer. A convenient wafer holder allows rapid transfer and ensures that pre-drying does not occur.

  • 170 mm diameter chamber – optimised for wafer/MEMS drying
  • Vertical chamber with top-loading and bottom draining – ensures specimens do not become uncovered during drying
  • Thermoelectric heating – accurate temperature control
  • Fine control needle valve pressure let down – precise control
  • Temperature monitoring and control with thermal cut-out protection
  • Pressure monitoring with safety cut-out for over pressure
  • Extended warranty option

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