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Q150T Plus

Turbomolecular pumped coater

Category: Failure Analysis, Material Characterization and Metrology

The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

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Quorum Q150T Plus Turbomolecular pumped coater
  • New touch and swipe capacitive screen
  • USB port for upgrades and download of process log files
  • Multiple-user profiles can be set up on one machine
  • New software sorts recipes per user according to recent use
  • 16GB of memory can store more than 1000 recipes
  • New multi-colour LED visual status indicator
  • Capable of achieving vacuum of 5 x 10-5 mbar

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