PEEC

Realtime Proximity Electronic Endpoint Characterization - extremely thin specimens

 

PEEC is a new, patent pending, characterization module for ASAP-1 IPS digital sample preparation system. PEEC improves sample preparation techniques, particularly at extremely thin remaining silicon thickness (RST).

PEEC offers several plotting and mapping modes that work in parallel with the ASAP-1 IPS, with the main polishing system acting as the Control Unit.

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