The signal detection from backside facilitates the use of probing and probe card to the wafer surface, and the sample setting can be performed smoothly. The platform, possible to mount multiple detectors and lasers, enables the selection of the optimum detector for performing various analysis methods such as light emission and heat generation analysis, IR-OBIRCH analysis, and others; moreover, letting dynamic analysis perform efficiently by tester connection.
Features:
The Model 520 PB is also suitable for laboratories, the pharmaceutical, food, light and consumer goods industries as well as production or for pharmacies and jewellery.
ULVAC-PHI nanoTOF II™ is a state-of-the-art TOF-SIMS with wide variety of options to choose from depending on the customer’s application.
PHI 710 scanning Auger electron spectrometer is the only AES instrument in the world that specified < 8 nm of Auger spatial resolution.
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