Regulus Series​

Ultra-high Resolution Scanning Electron Microscope​

As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform.

 

With optimized electron optical systems, the new Regulus series features resolutions down to 0.7 nm in the Regulus8220/8230/8240 models and 0.8 nm in the Regulus8100 model.​

Features

  • Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration
    (Regulus8220/8230/8240: 0.7 nm/1 kV; Regulus8100: 0.8 nm/1 kV)
  • Maximum magnification doubled from 1 million times to 2 million times*2
  • User-support functions to ensure high performance

HR & ULV Imaging

HR & ULV Imaging
Specimen: Gold particle on Carbon
Landing voltage: 10 V

UHR imaging

UHR imaging
Specimen: Catalyst
Accelerating voltage: 30 kV

HR & LV EDX analysis

HR & LV EDX analysis
Specimen: Tin ball
Landing voltage: 1.5 kV

*2
Only in Regulus8220/8230/8240

Specifications

Regulus 8100 Regulus 8220 Regulus 8230 Regulus 8240
Secondary Electron Resolution 0.7 nm (Vacc: 15 kV)
0.8 nm (Landing voltage: 1 kV)*3
0.6 nm (Vacc: 15 kV)
0.7 nm (Landing voltage: 1 kV)*3
Accelerating voltage 0.5~30 kV 0.5~30 kV
Landing voltage*3 0.1~2 kV 0.01~20 kV
Mag. 20~1,000,000 ×*4 20~2,000,000 ×*4
Specimen stage Stage control 3-axis motor drive*5 5-axis motor drive
Movable range X 0~50 mm 0~50 mm 0~110 mm 0~110 mm
Y 0~50 mm 0~50 mm 0~110 mm 0~80 mm
R 360°
T -5~70°
Z 1.5~30 mm 1.5~40 mm
Stage repeatability Less than ±0.5 µm
*3
Observation in beam deceleration mode
*4
Magnification specified based on a display size of 127 mm × 95 mm
*5
The 5-axis motor drive is an option for the Regulus8100

Learn More

 

Sigmatech Inc. Philippines is the leading provider of cutting-edge laboratory equipment crucial for a wide range of applications, including Quality Assurance/Quality Control (QA/QC), Metrology, Research and Development (R&D), Failure Analysis, Environmental and Chemical Analysis, and Process Control. Serving diverse industries in the Philippines, such as Semiconductor/Electronics, Pharmaceutical, Mining, Energy, and more, we are your go-to source for top-quality equipment, including Scanning Electron Microscope Philippines.  About us

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