Features:

• User-friendly operation: High specimen throughput, requiring 1 minute for specimen exchange and 5 minutes for voltage ramp-up (300 kV) and beam-on.
• High-resolution microscopy: Point-to-point resolution of 0.18 nm and lattice resolution of 0.1 nm.A stable 5-axis eucentric goniometer stage.
• Accelerating voltage: 300 kV, 200 kV, 100 kV Electron gun: Filament: LaB6 (DC heating)
• Resolution: 0.10 nm (lattice), 0.18 nm (point-to-point)
• Illumination system: 4-stage lens system
• Probe size: Micro mode: 0.05 – 0.2 µm (4 steps), Nano mode: 1 – 10 nm (4 steps)
• Imaging system: 5-stage lens system
• Stage translation Motor drive by CPU control X/Y = ±1 mm, Z = ±0.3 mm, tilt α = ±15°, β = ±15°
• Orius SC200 CCD Camera and the K2 IS direct electron detection CMOS high speed camera
• Vacuum system: Electron gun: Ion pump: 60 L/s; Column: TMP: 260 L/s; Viewing/camera chamber: Diffusion pump: 280 L/s
• Hitachi single tilt holder
• Hitachi standard double tilt holder
• Hitachi in-situ gas injection heating holder
• Hummingbird liquid cell electrochemistry holder