■Robust Stage for Flexibility in Sample Size, Shape, and Weight
■Increased Viewing Area—SEM MAP Expands the Boundaries of Sample Navigation
■ Automatic Functions for Operators of Any Skill Level
■Multi Zigzag enables wide-area observation across multiple areas.
■High Sensitivity Detectors Supporting All Observation Requirements
■3D Modeling Software: Hitachi map 3D*
■Image Processing, Measurement, and Analysis Software: Image-Pro® for Hitachi
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Features a graphical user interface offering easy operation and flexibility by:
With this function, the operator can use the device with confidence even for long-term continuous observation, such as particle analysis.
The Zigzag function enables automatic acquisition of a continuous field of view. The Multi Zigzag function enables zigzag settings at multiple locations on the sample stage, allowing the acquisition of multiple high-magnification images at user-selectable regions of interest. These images can be montaged to create pixel-dense-micrographs by connecting the acquired images with the Viewer function.
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The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.
The newly developed SEM/EDS integration system unifies stage location, condition setting, analysis, reports, and a series of operations from the SEM graphic user interface of the SU3800/SU3900. Controlling everything from the SEM graphic user interface improves throughput and reduces operator tasks.
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The SU3800/SU3900 feature a high-sensitivity UVD. UVD can acquire images and CL information with secondary electron information by detecting the light generated by collisions of secondary electrons and residual gas molecules accelerated by a bias electrode.
With a 5-segment design, it is possible to observe composition images, 3D images, and topographic images from 4 directions without sample rotation. Due to the design and high sensitivity of the detector, high-resolution imaging with improved S/N retention is possible.
Hitachi map 3D automatically combines 4 images acquired from different directions using the backscattered electron detector to construct a 3D model. Measurements such as height between two points, volume, and simple surface roughness (area roughness, line roughness, etc.) are possible. Since all backscattered electron data is collected in a single acquisition, it is not necessary to tilt the sample or adjust the field of view.
The SU3800/SU3900 feature IPI, which transfers SEM images to advanced image-processing software (Image-Pro® manufactured by Media Cybernetics Inc.). The operator can transfer data from SEM images to sophisticated image-analysis software with just one click.
The IS-202 Scanning Acoustic Microscope is ideally suited for mid-volume lab applications where high resolution and data acquisition flexibility are crucial to obtain high quality scanning results. Due to its small dimensions this desktop scanner easily fits in every laboratory environment.
The VIEW MicroLine® is a high-performance critical dimensional measurement system for wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
The VIEW MicroLine® Metrology Systems is a high-performance critical dimensional measurement system for wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
With the 360 EP series Analytical Balances, Precisa is setting new standards: innovative, high-tech instrumentation which includes the latest technical developments, unique performance features, best user-interface and the most modern design to establish the 360 EP series as the very bench-mark for modern laboratory technology.
Its large sample holder and scan area, high spatial resolution, fast acquisition speed and large bandwidth make it a powerful lab instrument for high resolution R&D applications and at the same time a perfectly suitable instrument for high volume quality control in production environment.
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