QVI VIEW MicroLine AF Plus Metrology Systems
The VIEW MicroLine® is a high-performance critical dimensional measurement system for wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
Excitation systemXGT-9000 provides ultimate performance and flexibility with its well-designed excitation system. The X-ray generator has high output up to 50 kV and 1000 µA. In addition, primary X-rays can be irradiated through our wide selection of probe sizes (10 microns – 1.2 mm). This includes ultra-high intensity probes to achieve fast measurement speeds. |
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Optical imagesCapturing clear images is critical for micro-XRF. XGT-9000 provides high resolution cameras to grasp the image of the whole sample and its details down to microscopic level. Multiple illumination modes help to observe brilliant images, even for reflective and transparent samples. |
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Sample chamberXGT-9000 accommodates a wide variety of samples from micro-size fragments, printed circuit boards, coins, sheet, powder, liquid, wafers. Various kinds of sample holders can be provided. In addition, up to 4 measurement environments can be selected to pull up sensitivity. |
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DetectorsXGT-9000 provides both a transmission X-ray detector and a fluorescent X-ray detector. The transmission X-ray detector enables users to detect internal defects and foreign matter of a sample. The fluorescent X-ray detector can detect from Americium down to carbon, with a light elements detector. |
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Software suiteXGT-9000 software, of course, covers all basic measurements such as single spot analysis, multiple spot analysis, line analysis, and map imaging. Apart from the standard software functions, advanced modules can be added to the software suite to provide more comprehensive user experiences.
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The VIEW MicroLine® is a high-performance critical dimensional measurement system for wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.
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