ULVAC-PHI nanoTOF II™ TOF-SIMS
ULVAC-PHI nanoTOF II™ is a state-of-the-art TOF-SIMS with wide variety of options to choose from depending on the customer’s application.
| Model | MH-390α |
| Maximum tube voltage / maximum tube current (maximum output) | 90kV / 0.25mA (10W) |
| Minimum focal dimension | 5 μm |
| X-ray detector | CMOS FPD |
| Maximum geometric magnification (viewing angle mm) | Approximately 30 times (1.71 x 1.71) |
| Maximum magnification on the monitor | Approximately 324 times (17-inch LCD resolution 1280 x 1024) |
| X-ray detector tilt mechanism | can be |
| Maximum geometric maximum magnification at maximum tilt (viewing angle mm) | Approximately 20 times (2.6 x 2.6) |
| Maximum magnification on the monitor at maximum tilt | Approximately 210 times (17-inch LCD resolution 1024 x 1280) |
| X-ray detector tilt angle | About 50 ° |
| System catalog specifications | 7LP / mm |
| Table size (mm) | 320 x 370 |
| XYZ axis stroke (mm) | 300 x 350 x 200 |
| Table load capacity (at uniform load) | 3kg |
| External dimensions (width x depth x height) (mm) | 810 x 875 x 1130 |
| weight | 350kg |
| X-ray leakage dose | 1 μ㏜ / h or less |
| Power supply | 50 / 60Hz 100kV ± 10% 15A (with grounded 2-pole outlet (former 3P)) |
ULVAC-PHI nanoTOF II™ is a state-of-the-art TOF-SIMS with wide variety of options to choose from depending on the customer’s application.
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