ULVAC-PHI Quantes X-ray Photoelectron Spectroscopy XPS
This state-of-the-art XPS instrument has a capability to analyze the very small area where the user is interested in and a large area of the uniform sample surface.
・ Stand-alone inspection device for
100% inspection equipped with long-life X-ray camera SID-A50・ M size board compatible model “NEO690Z”, L size board compatible model “NEO890Z”
・ Automatic inspection, CT inspection, 1 axis or 3 as options Axis rotator can be installed.
・ Equipped with 2 observation windows inside the device (supports both standing and sitting work)
・ Other custom specifications are available “
| Type | NEO690Z | NEO890Z | ||
| Maximum tube voltage / maximum tube current (maximum output) |
90 kV/0.25 mA (10 W) | |||
| Minimum focal dimension | 5 μm | |||
| X-ray detector | SID-A50 | |||
| Maximum geometric magnification (view angle (㎜)) |
About 35 times (1.33×1.47) | |||
| Maximum magnification on the monitor | Approximately 185 times (17-inch LCD resolution 1280 x 1024) | |||
| X-ray extractor tilting mechanism | can be | |||
| Maximum geometric magnification at maximum tilt (view angle (㎜)) |
About 27 times (1.72×1.9) | |||
| Maximum magnification on the monitor at maximum tilt | Approximately 146 times (17-inch LCD resolution 1280 x 1024) | |||
| X-ray extractor tilt angle | About 50 ℃ | |||
| System catalog specifications |
6 LP/㎜ | |||
| Table size (mm) | 350×400 | 510×560 | ||
| XYZ axis stroke (mm) | 300×350×220 | 460×510×220 | ||
| Table load capacity (at uniform load) |
5㎏ | |||
| External dimensions (mm) (width x depth x height) |
930 x 1104 (including handle) x 1320 | 1250 x 1425 (including handle) x 1320 | ||
| weight | 700 kg | 1000 kg | ||
| X-ray leakage dose | 1μSv/h or less | |||
| power supply | 50 / 60Hz AC100V ± 10% 15A (with grounded 2-pole outlet (former 3P)) | |||
| option | X-ray generator 100kV specification, CT function, automatic inspection function, 1-axis rotator, 3-axis rotator | |||
This state-of-the-art XPS instrument has a capability to analyze the very small area where the user is interested in and a large area of the uniform sample surface.
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You may contact our specialists by accomplishing form below.