The iPHEMOS-MPX is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.
With the introduction of SID-A50, X-ray inspection systems has been using detectors such as Image Intensifier (I.I.) and C-MOS Flat Panel Detectors, which needs to convert X-ray into optical light first, in order to visualize X-ray.
This modern FE-SEM requires not only high performance but also a multitude of functionalities including wide-area observation, in-situ analysis, variable pressure, high-resolution imaging at low accelerating voltages, and simultaneous multi-signal collection.
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