ULVAC-PHI nanoTOF II™ is a state-of-the-art TOF-SIMS with wide variety of options to choose from depending on the customer’s application.
PHI 710
Auger Electron Spectroscopy
PHI 710 scanning Auger electron spectrometer is the only AES instrument in the world that specified < 8 nm of Auger spatial resolution.
PHI X-tool
X-ray Photoelectron Spectroscopy
X-tool is an automated XPS microprobe easy to operate yet guarantees high performance XPS!
PHI Quantera II™
X-ray Photoelectron Spectroscopy
The PHI Quantera II is an XPS instrument which can produce a micro-focused, raster scanned x-ray beam with a minimum beam size of 7.5 μm in diameter.
PHI 5000 VersaProbe III
X-ray Photoelectron Spectroscopy
With the improved analyzer and input lens, the VersaProbe III has achieved three times as high sensitivity as conventional technologies, enabling even higher throughput and the best possible micro XPS analysis.
PHI Quantes
X-ray Photoelectron Spectroscopy
This state-of-the-art XPS instrument has a capability to analyze the very small area where the user is interested in and a large area of the uniform sample surface.
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