Dual Scanning X-ray Photoelectron Microprobe Equipped with Hard X-Ray

Dual Scanning Monochromatic X-ray Source

Equipped with a dual scanning X-ray source composed of the monochromatic Cr Kα (5.4 keV) and Al Kα (1.5 keV), the PHI Quantes is capable of obtaining secondary electron images (SXI) by scanning X-ray beam over the sample, which precisely allows to identify areas and/or points where you want to analyze. Enhanced SmartSoft-XPS can control the X-ray anode position and the motorized mechanical shutter, which allows rapid switching between the Cr Kα and the Al Kα. The switchover requires no adjustments, making it easy to measure the same areas or points with both the Cr Kα and the Al Kα.

Dual Beam Source for Easy Measurement of the Same Spot

Software control of the X-ray anode allows rapid switching between the Cr Kα and the Al Kα. The switchover requires no adjustments, making it easy to measure the same spot with both the Cr Kα and the Al Kα.

Turnkey Charge Neutralization

The patented turnkey charge neutralization that allows automatic charge compensation of the charged sample surface is also available on the PHI Quantes, as well as our other PHI XPS series, even when using Cr Kα.

> Description of Turnkey Charge Neutralization (to PHI Quantera II)

Automatic Analysis Mode

Fully-automated analysis routine can be easily programed even if it takes days. The two standard parking positions in the analysis chamber enables fully-automated measurement of all samples, maximum of three, set on the PHI Quantes. In addition, the state-of-the-art turnkey charge neutralization technique also allows fully-automated analysis on insulating samples.

> Description of Navigation and Automatic Analysis (to PHI Quantera II)

Proven High Voltage Analyzer

The proven high voltage analyzer, together with the newly-developed high transmission input lens, on the PHI Quantes enables superior sensitivity even when using Cr Kα. High voltage proof 32-channel multi-channel detector allows snapshot acquisition up to 128 channels in interlaced mode.

Expanding Extensive Applications Using Two Different Energy X-ray

Information Depth

Here is an example of information from the Si substrate, obtained through PMMA films with different thicknesses, measured using the Al Kα and Cr Kα.
Information depth of using Cr Kα is about three times larger than Al Kα.

Unique Features of the PHI Quantes

Qualitative and Quantitative Analysis Using the Cr Kα

Data processing of the results of the Cr Kα can be performed in the same manner as the conventional XPS using the PHI MultiPak analysis software.

The MultiPak software also includes database of photoelectron peak positions (PeakID) and relative sensitivity factors (RSF) of elements, which are compatible with Cr Kα. RSF database for Cr Kα allows quantitative evaluations as well as Al Kα.

Spectra taken by Al Kα and Cr Kα can be processed simultaneously on the MultiPak, which allows simple comparison and other data processing between results of different X-ray source.

Built-in Dual Ion Gun [NEW]

Fully automatic measurement of the Dual X-ray x Dual Ion gun

With this option on the Q series of automatic models, fully automatic measurement of the Dual X-ray x Dual Ion gun is now available.

The Dual Ion Gun is a monomer/cluster switchable dual ion gun built into the vacuum chamber. It can be mounted in place of the standard built-in monomer ion gun and can be used for inorganic depth analysis using monomers and low-damage organic depth analysis using clusters with a single ion gun. Naturally, this ion gun is also capable of handling the low-acceleration ion in the neutralization mode, which is one of our unique reputations.

In addition, the new Dual Ion Guns can be used to change the cluster size, and a new cluster size instrument can be developed and added. This makes it possible to confirm the actual cluster size used inside the device.