Real-time SEM monitoring during FIB milling
Sample: NAND flash memory
Accelerating voltage: 1 kV
FOV: 0.6 µm
With sample orientation control
Without sample orientation control
EB: Electron Beam
FIB: Focused Ion Beam
Ar: Argon ion beam
| FIB column | |
|---|---|
| Resolution (SIM) | 4 nm @ 30kV, 60 nm @ 2kV |
| Acceleration voltage | 0.5 kV – 30 kV |
| Beam current | 0.05 pA – 100 nA |
| FE-SEM column | |
| Resolution | 2.8 nm @ 5kV, 3.5 nm @ 1kV |
| Acceleration voltage | 0.5 kV – 30 kV |
| Electron source | Cold cathode field emission source |
| Detector | |
| Standard detector | Upper/Lower SED & BSED |
| Stage | X: 0 – 205 mm Y: 0 – 205 mm Z: 0 – 10 mm R: 0 – 360° infinite T: -5 – 60° |
Sigmatech Inc. Philippines is the leading provider of cutting-edge laboratory equipment crucial for a wide range of applications, including Quality Assurance/Quality Control (QA/QC), Metrology, Research and Development (R&D), Failure Analysis, Environmental and Chemical Analysis, and Process Control. Serving diverse industries in the Philippines, such as Semiconductor/Electronics, Pharmaceutical, Mining, Energy, and more, we are your go-to source for top-quality equipment, including Electron Microscopes in the Philippines. About us
This new generation of the long-standing Hitachi tabletop microscopes (TM) integrates ease of use, optimized imaging, and high-image quality, while maintaining the compact design of the well-established Hitachi TM Series products.
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