Ulvac PHI nanoTOF Time-of-flight Secondary Ion Mass Spectroscope (TOF-SIMS)
Further Developed Pulsed Ion Source ensures high quality results Minimum beam diameter is 70 nm or less Ion source can be selected from gallium, gold, and bismuth. Performance of the newly developed pulsed ion source The newly developed pulsed ion source enables a minimum spatial resolution of 70 nm or less. The newly designed bunching […]
Ulvac PHI 710 Auger Electron Spectroscopy (AES, SAM)
SEM resolution ≤ 3 nm, AES resolution ≤ 8 nm In Auger analysis (spectrum, depth profile or mapping), it is necessary to set AES analysis point with SEM image. A fine focused electron beam is required for SEM imaging and an extremely stable electron beam at enough current for AES analysis is required at a […]