Surface Analysis

What is surface? A surface is the outermost layer of any physical object. It is the portion of the object that can be perceived by an observer using their sense of sight and touch and is the portion with which surrounding materials first interact. The outermost part of a material is an extremely important component […]

Ulvac PHI 710 Auger Electron Spectroscopy (AES, SAM)

SEM resolution ≤ 3 nm, AES resolution ≤ 8 nm In Auger analysis (spectrum, depth profile or mapping), it is necessary to set AES analysis point with SEM image. A fine focused electron beam is required for SEM imaging and an extremely stable electron beam at enough current for AES analysis is required at a […]