Hitachi Nano-Prober NP6800 SEM Probing System – Sigmatech inc. Philippines
The Hitachi NP6800 is a SEM-based dedicated probing system designed to meet the analytical needs of the 10-nm design node semiconductor device and beyond.
The AFM100 Series is Hitachi’s next generation probe microscopy platform. The AFM100 Plus and AFM100 systems that make up this series have been designed to expand the capabilities and performance of atomic force microscopy, while providing an easy-to-use Atomic Force Microscope platform suitable for users of all experience levels.
Experience the finest reliability and innovation with the AFM100 Series.
AFM100 Plus | AFM100 | |
Detection System/Light Source | Optical lever/SLD (Super luminescent diode) | |
---|---|---|
Lever holder | Premount holder*, multi-holder* | |
Basic Specifications | RMS noise level: ≦0.03 nm, in-plane drift: ≦0.03 nm/sec | |
Sample size | Max. 35 mmφ, thickness 10 mm, (max. 50 mm sq., thickness 20 mm)* | |
Scanner (Scan range)* | (XY:20 μm/Z:1.5 μm, XY:100 μm/Z:15 μm, XY:150 μm/Z:5 μm)*(Included with a 5-year warranty) | |
Light microscope | Microscope with zoom function (Field of view XY:1.8 x 1.38 to 0.26 x 0.2 mm)* Simple optical microscope (Field of view XY:1.6 x 1.2 mm)* |
Simple optical microscope (field of view XY:1.6 × 1.2 mm) |
Basic functions | AFM, DFM, PM, FFM, SIS-shapes/properties, Q-value control | AFM, DFM, PM, FFM, SIS-shapes |
Vibration isolation and noise isolation mechanism | Passive vibration isolation air table and sound-proof cover | Standard tabletop |
Sample transfer mechanism | Manual Stage XY:±2.5 mm, Impact Stage Set (Conductive Type)* | |
Measurement environment | Atmosphere, in liquid*, heated* (room temperature to 250 °C), heated in liquid* (room temperature to 60 °C) | |
Other functions | Self-check function, software download service, AFM marking* | |
Power Supply Specifications | AC 100 V ± 10 V, 15 A, 1 line, D inoculated grounded receptacle |
※The asterisk (*) in the table indicates feature is optional.
※For detailed specifications, please refer to the product specification sheet.
The Hitachi NP6800 is a SEM-based dedicated probing system designed to meet the analytical needs of the 10-nm design node semiconductor device and beyond.
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