Park Systems Accurion RSE Referenced Spectroscopic Ellipsometry

The Accurion RSE (Referenced Spectroscopic Ellipsometer) is a high-speed ellipsometry system designed for rapid, large-area thickness mapping of thin films and surfaces. By directly comparing a sample to a reference, RSE enables highly sensitive, differential measurements and combines ellipsometric precision with exceptional acquisition speed. With up to 200 complete spectra recorded per second, the system […]

Park Systems Accurion SIMON Imaging Spectroscopic Ellipsometry

Accurion SIMON is a compact entry-level system for Imaging Ellipsometry, specifically designed for routine measurement and inspection tasks. Based on a fixed-angle ellipsometer design, SIMON offers robust operation and straightforward handling, making imaging ellipsometry accessible for quality control and standard laboratory applications. The system can be operated in two modes: In microscopic mode, rapid visualization […]

Park Systems Accurion EP4 Imaging Spectroscopic Ellipsometry

Accurion EP4 is a high-end system for Imaging Spectroscopic Ellipsometry, combining spectroscopic ellipsometry and optical microscopy in a single instrument. It enables spatially resolved, parallel measurement of film thickness and refractive index on micro-structured samples with lateral resolution down to 1 µm, featuring live ellipsometric contrast imaging and direct selection of regions of interest for […]