Accurion SIMON is a compact entry-level system for Imaging Ellipsometry, specifically designed for routine measurement and inspection tasks. Based on a fixed-angle ellipsometer design, SIMON offers robust operation and straightforward handling, making imaging ellipsometry accessible for quality control and standard laboratory applications. The system can be operated in two modes: In microscopic mode, rapid visualization of thickness variations and defects is achieved, even for ultra-thin layers such as monolayers (~0.35 nm). In ellipsometric mode, film thickness and refractive index are determined quantitatively. Typical applications include surface inspection of homogeneity and defects on large samples as well as the fast localization of 2D material flakes.
Surface Inspection Metrology of Nanofilms
Typical Applications: Large Area Inspection and Automatic Flake Search
Accurion SIMON enables fast large-area inspection with automated stitching, microscopic defect visualization, and automatic flake detection including histogram-based thickness analysis for efficient quality control.
Thickness and Refractive Index Measurements of Microstructures
Accurion SIMON combines ellipsometry and microscopy to map thickness and refractive index of microstructures with high precision, making even small variations in films and waveguides directly visible.
Key Features
- Easy-to-use entry-level system for Imaging Ellipsometry, designed for routine inspection tasks
- Imaging ellipsometry with lateral resolution down to 1 µm for micro-structured samples
- Quantitative measurement of film thickness and refractive index in ellipsometric mode
- Fast visualization of thickness distributions and hidden defects across large sample areas
