Seiwa Optical Semiconductor Auto Review System

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

Key Industries: Semiconductor and Electronics and more.

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

Features

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SU7000

Scanning Electron Micrscope

The SU7000 is the ultimate high-performance all-rounder: an ultra high resolution Schottky FESEM offering nanoscale imaging and powerful analysis

K850

Critical Point Dryer

The K850 combines versatility and ease of operation. Built-in thermo-electric heating and adiabatic cooling allow precise temperature control.

NEXTA DSC

Differential Scanning Calorimeter

DSC is used to measure heat flow for material characterization by providing thermal properties such as melting point, glass transition and crystallization.

AFM100

Multifunctional Probe Atomic Force Microscope

The AFM100 Series is Hitachi’s next generation probe microscopy platform.

TM4000 Plus

Tabletop Scanning Electron Microscope

This new generation of the long-standing Hitachi tabletop microscopes (TM) integrates ease of use, optimized imaging, and high-image quality, while maintaining compact design

PHI 710

Auger Electron Spectroscopy (AES, SAM)

The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.

IS 350

Scanning Acoustic Microscope

The Insight-Scan (IS) series of Scanning Acoustic Microscopes(SAM) integrates the finest state-of-the-art technology for high resolution, high speed, fully digital non-destructive sample analysis.

nanoTOF II

Time-of-flight Secondary Ion Mass Spectroscope (TOF-SIMS)

PHI’s Latest Generation of TOF-SIMS, having a Modern Ergonomic Package, Smaller Footprint, and Advanced Features

Wafer Inspection System

Seiwa Wafer review system visually inspects the defect location detected from AOI systems. This review system is able to capture the visual data and add it to previous inspection results.

iPHEMOS MPX

Inverted Emission Microscope

The iPHEMOS-MPX is a high-resolution Inverted Emission Microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers. By using On-Fly measurement mode, system perform high speed and high accuracy visual inspection for such as pattern defects, contamination, cracks.

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This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.