Seiwa Optical Semiconductor Auto Review System

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

Key Industries: Semiconductor and Electronics and more.

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

Features

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NEXTA DMA

Dynamic Mechanical Analyzer

Hitachi’s DMA is the perfect tool for assessing both stiff and soft samples, while also capturing rapid modulus changes.

PHI 710

Auger Electron Spectroscopy (AES, SAM)

The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.

Scanning Electron Microscope

FlexSEM 1000 II

The FlexSEM 1000 II VP-SEM combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package.

SU9000

Ultra-high Resolution Scanning Electron Microscope

The Cold Field Emission source is ideal for high-resolution imaging with a small source size and energy spread. Innovative CFE Gun technology contributes the ultimate FE-SEM with superior beam bright

SU8600

Ultra High Resolution Cold-FESEM

The SU8600 incorporates a highbrightness cold-field emitter (CFE) to allow acquisition of ultra-high-resolution images even at low accelerating voltages.

AFM100

Multifunctional Probe Atomic Force Microscope

The AFM100 Series is Hitachi’s next generation probe microscopy platform.

ZONESEMⅡ

Sample Cleaner

The ZONESEMⅡ Tabletop Sample Cleaner uses UV-based cleaning technology to minimize or eliminate hydrocarbon contamination for electron microscopy imaging.

Wafer Inspection System

Seiwa Wafer review system visually inspects the defect location detected from AOI systems. This review system is able to capture the visual data and add it to previous inspection results.

Q150

Metal/Carbon Sputtering

With options for both oxidizing and non-oxidizing metals, as well as carbon evaporation, Quorum coaters are suitable for applications, including high-resolution SEM and FIB-SEM, ensuring precise resu

MC1000

Ion Sputter Coater

The MC1000 Ion Sputter Coater is a sample preparation instrument for use with a Scanning Electron Microscope (SEM) designed to deposit a thin metal coating, such as platinum (Pt), gold (Au), platinum-

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers. By using On-Fly measurement mode, system perform high speed and high accuracy visual inspection for such as pattern defects, contamination, cracks.

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This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.