Seiwa Optical Semiconductor Auto Review System

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

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Phemos-X

Emission microscope

The PHEMOS-X is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.

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IR5

FTIR Spectrometer

A high‑performance benchtop FTIR, the IR5 is ideal for everyday analysis, delivering fast and accurate IR measurements.

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SU7000

Scanning Electron Micrscope

The SU7000 is the ultimate high-performance all-rounder: an ultra high resolution Schottky FESEM offering nanoscale imaging and powerful analysis

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IS 350

Scanning Acoustic Microscope

The Insight-Scan (IS) series of Scanning Acoustic Microscopes(SAM) integrates the finest state-of-the-art technology for high resolution, high speed, fully digital non-destructive sample analysis.

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NEXTA DSC

Differential Scanning Calorimeter

DSC is used to measure heat flow for material characterization by providing thermal properties such as melting point, glass transition and crystallization.

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Semiconductor Auto Review System

Solution for the review of defects of semiconductor integrated circuit detected by AOI/AVI at front end processing, helps to eliminate false defects and increase overall yield.

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