The AFM100 Series is Hitachi’s next generation probe microscopy platform. The AFM100 Plus and AFM100 systems that make up this series have been designed to expand the capabilities and performance of atomic force microscopy, while providing an easy-to-use platform suitable for users of all experience levels.
Experience the finest reliability and innovation with the AFM100 Series.

The AFM100 Series is Hitachi’s next generation probe microscopy platform. The AFM100 Plus and AFM100 systems that make up this series have been designed to expand the capabilities and performance of atomic force microscopy, while providing an easy-to-use platform suitable for users of all experience levels.
Experience the finest reliability and innovation with the AFM100 Series.

Hitachi Atomic Force Microscope AFM100 Multifunctional Probe Microscopy Platform

Pre-mounted cantilevers make replacement EASY(option)

Pre-mounted cantilevers make replacement EASY(option)

Automated measurement & analysis with one-click autopilot function

Automated measurement & analysis with one-click autopilot function

Correlative SEM-EDS Analysis with our AFM Marking Function

Analyze the same region of interest (ROI) with SEM, EDS, and AFM: More Information = Better Results!

  • Automated AFM Marking Features with Navigation Software.
・Automated AFM Marking Features with Navigation Software.
※SÆMic. is a generic term for SEM-AFM correlative analysis recommended by Hitachi High-Tech.

[Evaluating AFM-KFM-SEM-EDS of Aluminum Alloy before and after Corrosion]

[Evaluating AFM-KFM-SEM-EDS of Aluminum Alloy before and after Corrosion]

Specifications

 AFM100 PlusAFM100
Detection System/Light SourceOptical lever/SLD (Super luminescent diode)
Lever holderPremount holder*, multi-holder*
Basic SpecificationsRMS noise level: ≦0.03 nm, in-plane drift: ≦0.03 nm/sec
Sample sizeMax. 35 mmφ, thickness 10 mm, (max. 50 mm sq., thickness 20 mm)*
Scanner (Scan range)*(XY:20 μm/Z:1.5 μm, XY:100 μm/Z:15 μm, XY:150 μm/Z:5 μm)*(Included with a 5-year warranty)
Light microscopeMicroscope with zoom function (Field of view XY:1.8 x 1.38 to 0.26 x 0.2 mm)*
Simple optical microscope (Field of view XY:1.6 x 1.2 mm)*
Simple optical microscope
(field of view XY:1.6 × 1.2 mm)
Basic functionsAFM, DFM, PM, FFM, SIS-shapes/properties, Q-value controlAFM, DFM, PM, FFM, SIS-shapes
Vibration isolation and noise isolation mechanismPassive vibration isolation air table and sound-proof coverStandard tabletop
Sample transfer mechanismManual Stage XY:±2.5 mm, Impact Stage Set (Conductive Type)*
Measurement environmentAtmosphere, in liquid*, heated* (room temperature to 250 °C), heated in liquid* (room temperature to 60 °C)
Other functionsSelf-check function, software download service, AFM marking*
Power Supply SpecificationsAC 100 V ± 10 V, 15 A, 1 line, D inoculated grounded receptacle

The asterisk (*) in the table indicates feature is optional.

For detailed specifications, please refer to the product specification sheet.

Hitachi Atomic Force Microscope AFM100 Multifunctional Probe Microscopy Platform
Hitachi Atomic Force Microscope AFM100 Multifunctional Probe Microscopy Platform

For more information, contact us. See more on Hitachi’s website

Related Products

Solution for the review of defects of semiconductor integrated circuit detected by AOI/AVI at front end processing, helps to eliminate false defects and increase overall yield.
Solution for the review of defects of semiconductor integrated circuit detected by AOI/AVI at front end processing, helps to eliminate false defects and increase overall yield.
The Insight-Scan (IS) series of Scanning Acoustic Microscopes(SAM) integrates the finest state-of-the-art technology for high resolution, high speed, fully digital non-destructive sample analysis.
The Insight-Scan (IS) series of Scanning Acoustic Microscopes(SAM) integrates the finest state-of-the-art technology for high resolution, high speed, fully digital non-destructive sample analysis.
This new generation of the long-standing Hitachi tabletop microscopes (TM) integrates ease of use, optimized imaging, and high-image quality, while maintaining compact design
This new generation of the long-standing Hitachi tabletop microscopes (TM) integrates ease of use, optimized imaging, and high-image quality, while maintaining compact design
IR-2200 Microscope System enables the user to inspect sub-surface images including MEMS device, 3D stacks, incoming wafers, photovoltaic and wafer level CSP’s with an astonishing level of precision.
IR-2200 Microscope System enables the user to inspect sub-surface images including MEMS device, 3D stacks, incoming wafers, photovoltaic and wafer level CSP’s with an astonishing level of precision.
Hitachi High-Tech’s scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance.
Hitachi High-Tech’s scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance.
The HT7800 RuliTEM is a 120 kV transmission electron microscope (TEM) with multiple lens configurations, including a standard lens for unsurpassed high contrast and a class-leading HR lens.
The HT7800 RuliTEM is a 120 kV transmission electron microscope (TEM) with multiple lens configurations, including a standard lens for unsurpassed high contrast and a class-leading HR lens.
The IM4000Plus Ion Milling System utilizes a broad, low-energy Ar+ ion beam milling method to produce wider, undistorted cross-section milling or flat milling.
The IM4000Plus Ion Milling System utilizes a broad, low-energy Ar+ ion beam milling method to produce wider, undistorted cross-section milling or flat milling.
ULTRAPOL Advance has been designed to be an all-in-one lapping & polishing workstation for the production of flat surfaces.
ULTRAPOL Advance has been designed to be an all-in-one lapping & polishing workstation for the production of flat surfaces.

Product added to Quote list ✔

failure analysis, material characterization, and metrology equipment

Subscribe to newsletter

Sign up for our newsletter to get updates on promos, seminars, events, products, application notes and more.

Inquire for this Product

AFM100
Multifunctional Probe Atomic Force Microscope
AFM100
Multifunctional Probe Atomic Force Microscope