Request Quote

Ulvac PHI 710 Auger Electron Spectroscopy (AES, SAM)

SEM resolution ≤ 3 nm, AES resolution ≤ 8 nm In Auger analysis (spectrum, depth profile or mapping), it is necessary to set AES analysis point with SEM image. A fine focused electron beam is required for SEM imaging and an extremely stable electron beam at enough current for AES analysis is required at a […]

failure analysis, material characterization, and metrology equipment

Subscribe to newsletter

Sign up for our newsletter to get updates on promos, seminars, events, products, application notes and more.