Lyncée Reflection series are optical interferometers powered by digital holographic microscopy (DHM). Measurements are acquired in real time, with a single acquisition without mechanical scanning.
This quasi-instantaneous measurement specificity enables DHM to measure not only the 3D topography of samples, but also to monitor the time response of samples to external stimuli, characterize samples and optimize processes during manufacturing, characterize very large surfaces and screen them for small defects, and operate in situ at high or low temperatures, in liquid, under vacuum, or in a gas-controlled environment.
DHM are used in research labs and production facilities for semiconductor, MEMS, medtech, watch industry, industrial metrology, polymer, micro-nano technology, micro-optics, and photonics applications.
Key Features
Advanced Performance
- Interferometric resolution
- High-speed acquisition and real-time data display
- Digital refocusing for high resolution imaging at high speed and in challenging environments
Address All Experimental Needs
- Multi-wavelengths: for extended vertical range
- Stage: up to 300 mm travel range and 6-axis
- Wide range of options dedicated to specific applications
- Fully upgradeable
A Workflow Shaped for Fast and Time-Resolved Applications
3D data acquisition is performed in a single image capture and is repeated at the camera frequency. All the pixels in the field of view are acquired simultaneously, without any lateral, vertical, or phase mechanical scanning enabling full-field fast-acquisition of dynamics samples.
The acquisition time, which effectively defines the temporal resolution, is equal to the camera’s shutter open time or, in the case of a pulsed source, the duration of the laser pulse. For standard systems, it is typically a few hundreds of microseconds, a few tens of microseconds when using high-speed cameras, and can be as small as five nanoseconds for MEMS analysis.
This exceptional acquisition speed is ideal for the dynamic measurement of sample deformation and for characterizing large-area samples. It ensures excellent repeatability and high robustness against environmental disturbances, which is particularly relevant for industrial applications.
Lyncée Reflection Head Models
Lyncée R1
Operating at a single wavelength, Lyncée R1 is an ideal solution for most applications in MEMS vibration analysis and 3D topography measurement of surfaces with small step heights below 333 nm.
Lyncée R2
Equipped with two wavelengths, Lyncée R2 extends the step-height measurement range up to 2.1 µm while maintaining the vertical resolution.
Lyncée R3
Equipped with three wavelengths, Lyncée R3 further extends the step-height measurement range up to 24 µm, making it ideal for studying large discontinuous structures.
Flexible Upgrade and Options
Lyncée Reflection is designed with modularity in mind. Adding wavelength in the DHM head, or objective, motorized stage, environmental chamber, options to control samples can be upgraded to suit applications and budgets at any time.
Objective Lens Sets
Objective turret supports up to six objectives from 1.25 × to 100 × magnification, which allows easy switching between wide-field overview and high-magnification inspection. The choice of objectives encompasses ultra-high working distances, ultra-high NA, glass corrected as well as oil, and water models.
Motorized Sample Stage
Motorized stages are available for enhancing measurement capabilities. They can be manually controlled by a joystick and are fully automated by the Koala software, enabling users to automate displacements for multisite measurements or to enlarge the measurement field of view by automatically acquiring and stitching multiple images together. A large selection of stages is available to fulfill application and sample requirements. These includes linear stages with 100 mm to 300 mm XY travel-range and 38 mm travel-range along the Z direction (optical axis, focus).
6-Axis Control
Solutions with up to 6-axis control enable precise measurement of spherical and cylindrical samples, as well as structures such as micromirrors that deflect light at large angles.
Rotating Stage
For measuring the entire surface of cylindrical components such as cylinders, shafts, metal rolls, and glass tubes, Lyncée Reflection offers a motorized rotating stage that is compatible with the motorized or manual XYZ linear stage.
The separation between the two driving rollers can be adjusted to accommodate samples of various diameters. A dedicated interface allows users to control the displacement both along the axis of symmetry of the sample and to rotate it in order.
Stroboscopic Unit
Specialized for MEMS analysis, the stroboscopic unit works with Koala MEMS Analyzer Suite to synchronize MEMS excitation driving signal and hologram acquisition. It enables precise topography measurements of the MEMS along its excitation period for frequencies up to 25 MHz with a bandwidth of 200 MHz.
Vacuum and Thermal Chambers
The unique optical setup of Lyncée Reflection series enables measurement through optical windows. The optical thickness of the window is automatically accounted for, without the need to manually add perfectly calibrated glass compensation slides in the reference beam.
Two optional vacuum/thermal chambers modules optimized for Lyncée Reflection series are available for measuring samples under various gas, thermal and pressure conditions. The chambers are equipped with ports to purge the chamber of a desired gas.
Stage Top Vacuum Chamber
Stage-top vacuum chamber is compatible with the manual or motorized stage, accepts samples up to Ø40 mm, supports temperatures ranging from -196 to 350 °C.
Large Vacuum Chamber V400
V400 vacuum chamber includes a motorized stage, a large viewing window and accommodates samples up to 100 × 100 mm. It is compatible with manual or motorized stages, supports temperatures ranging from -40 to 120 °C.
Principle of Digital Holographic Microscopy
DHM Technology
DHM is the digital extension of classical holography. It is a patented technology that records holograms with a digital camera rather than on a photographic plate. A numerical processing replaces the classical re-illumination process to retrieve, in real time, the phase and intensity changes induced by the imaged sample. This information is then interpreted to retrieve the sample topography.
