This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

Key Industries: Semiconductor and Electronics and more.

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

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Features

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failure analysis, material characterization, and metrology equipment

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Semiconductor Auto Review System
Semiconductor Auto Review System