Seiwa Optical Semiconductor Auto Review System

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

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Wafer Inspection System

Seiwa Wafer review system visually inspects the defect location detected from AOI systems. This review system is able to capture the visual data and add it to previous inspection results.

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NEXTA STA Series

Simultaneous Thermogravimetric Analyzer (DSC-TGA)

STA (simultaneous thermogravimetric analysis) measures DSC and TGA simultaneously in a single unit.

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IR-2200

Infrared Microscope

IR-2200 Microscope System enables the user to inspect sub-surface images including MEMS device, 3D stacks, incoming wafers, photovoltaic and wafer level CSP’s with an astonishing level of precision.

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AFM100

Multifunctional Probe Atomic Force Microscope

The AFM100 Series is Hitachi’s next generation probe microscopy platform.

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Scanning Electron Microscope

FlexSEM 1000 II

The FlexSEM 1000 II VP-SEM combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package.

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PHI 710

Auger Electron Spectroscopy (AES, SAM)

The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.

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PHI nanoTOF ３+

Time-of-Flight Secondary Ion Mass Spectrometry

ULVAC PHI’s Latest Generation of TOF-SIMS, have a Modern Ergonomic Package, Smaller Footprint, and Advanced Features.

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ArBlade 5000

Ion Milling System

The top of the line ion-milling system for producing exceptional quality cross section or flat-milling samples for electron microscopy.

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Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers. By using On-Fly measurement mode, system perform high speed and high accuracy visual inspection for such as pattern defects, contamination, cracks.

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This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.