Seiwa Optical Semiconductor Auto Review System

Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.

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K975X

Turbo-Pumped Thermal Evaporator

The Quorum K975X Turbo-Pumped Thermal Evaporator is a high vacuum evaporator for TEM, SEM and thin film applications.

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ZONESEMⅡ

Sample Cleaner

The ZONESEMⅡ Tabletop Sample Cleaner uses UV-based cleaning technology to minimize or eliminate hydrocarbon contamination for electron microscopy imaging.

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SU3800 / SU3900

Scanning Electron Microscope

Hitachi High-Tech’s scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance.

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Wafer Inspection System

Seiwa Wafer review system visually inspects the defect location detected from AOI systems. This review system is able to capture the visual data and add it to previous inspection results.

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IM4000Plus

Ion Milling System

The IM4000Plus Ion Milling System utilizes a broad, low-energy Ar+ ion beam milling method to produce wider, undistorted cross-section milling or flat milling.

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Hitachi HT7800

Transmission Electron Microscope (TEM)

The HT7800 RuliTEM is a 120 kV transmission electron microscope (TEM) with multiple lens configurations, including a standard lens for unsurpassed high contrast and a class-leading HR lens.

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Q150

Metal/Carbon Sputtering

With options for both oxidizing and non-oxidizing metals, as well as carbon evaporation, Quorum coaters are suitable for applications, including high-resolution SEM and FIB-SEM, ensuring precise resu

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Scanning Electron Microscope

FlexSEM 1000 II

The FlexSEM 1000 II VP-SEM combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package.

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Semiconductor Auto Review System

This equipment is for automated optical inspection system for semiconductor device wafers. By using On-Fly measurement mode, system perform high speed and high accuracy visual inspection for such as pattern defects, contamination, cracks.

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This equipment is for automated optical inspection system for semiconductor device wafers.
By using On-Fly measurement mode, system perform high speed and high accuracy
visual inspection for such as pattern defects, contamination, cracks.