Park FX200 is Park Systems’ latest innovation in atomic force microscopy (AFM), designed to accommodate samples up to 200 mm. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX200 delivers unmatched precision and reliability.
Like all Park AFMs, FX200 features an orthogonal scan system and True Non-contact™ mode, enabling accurate, high-resolution metrology, even on the most delicate or fragile samples.
Key features of FX200 include automatic probe exchange, automatic laser beam alignment, and a full 200 mm sample view camera; the signatures of FX-series AFMs that streamline operation while significantly enhancing productivity. Additional capabilities such as automated scan parameter optimization, optical autofocus, sequential measurements across multiple positions, and powerful data analysis tools further simplify even the most complex workflows.
With advanced capabilities and a user-friendly interface, the FX200 offers a versatile solution for nanoscale imaging and analysis across both research and industrial settings.
Key Features
Superior FX Mechanical Design
The FX-series AFMs are designed for minimal mechanical noise. The optical microscope is decoupled from the Z stage, lowering the weight on the Z stage and thus reducing susceptibility to mechanical disturbances. The Z stage itself is built more robustly with a high-stiffness cross-roller guide and two bearing blocks.
A wide trapezoidal strut reinforces the mechanical rigidity of the FX200, while the use of expansion-matched materials with low thermal expansion coefficients mitigates thermal drift, ensuring reliable performance over time.
FX Laser Beam Path
The FX optics structure integrates a fiber-coupled laser (superluminescent diode; SLD) into the optical microscope assembly. The laser beam is focused through the objective lens and remains fixed at the center of the optical field of view.
The focused beam has a reduced spot size, minimizing spillover and enabling easy adoption of small, high-frequency cantilevers.
Automatic Laser Beam Alignment
The vision-guided alignment system detects the cantilever shape and position and then moves the optics XY stage to align the cantilever at the center of the field of view, precisely where the laser beam is focused. Two precision motors in the FX scan head adjust the steering mirror to align the laser beam in the center of the position-sensitive photodetector (PSPD).
Automated laser beam alignment combined with automatic PSPD centering reduces setup time, ensures consistent alignment, and makes operation smooth for both new and experienced users.
Automatic Probe Exchange
AFM probe exchange can be challenging, even for experienced users, and can often lead to cantilever breakage, increasing setup time and consumable costs. Park AFMs address this difficulty by using pre-aligned probe chip carriers with kinematic mounting points for reliable and consistent tip positioning.
Each chip carrier is marked with a QR code containing detailed information, including probe type, serial number, date manufactured, and specifications.
The FX head’s Z scanner features three precision ball seats for kinematic mounting, complemented by magnets at the base to ensure a secure, reliable, and repeatable mounting position.
The automatic tip exchanger (ATX) module stores up to 16 pre-mounted probes. After the ATX camera scans the probes’ QR codes, the SmartScan™ AFM operating software displays probe information for each slot, allowing the user to select full or vacant probe slots with a simple mouse click.
After a slot is selected, the AFM head moves down to pick the probe up from or park the currently mounted probe into the slot, depending on the position of the strong magnet underneath.
Sample-View Camera
With the macro image of the sample chuck captured by the sample-view camera, users can point and click on the sample view image to move the XY stage to the desired location, making it easy to locate areas of interest and return to the same spot, even for large samples such as a 200 mm wafer.
Improved On-Axis Optics
The unobstructed optical microscope provides a clear field of view and can resolve line widths down to 0.87 μm.
Park AFM Technology
Orthogonal Scan System
Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. FX200, like all Park AFMs, employs an advanced orthogonal scan system featuring a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe’s Z-axis motion. This separated scanner system ensures highly orthogonal, linear scans with minimal out-of-plane motion and fast dynamic performance. Equipped with low-noise optical sensors for XY feedback and an ultra-low-noise strain gauge sensor for Z control, a closed-loop servo control system ensures precise and repeatable scanning across all axes.
For large samples, a single-servo XY scan architecture can be vulnerable to the rotational motion of the sample chuck. This rotational motion can introduce positioning errors that increase with distance from the position sensor.
The FX200 resolves this issue with a dual-servo XY scanner architecture, with two pairs of actuators and position sensors mounted on opposite sides of each axis. All four actuators are controlled independently to ensure accurate positioning across the entire 200 × 200 mm² sample area.
Park AFM Technology
True Non-Contact™ Mode
FX200 features True Non-contact™ mode, a proprietary technology exclusively offered by Park Systems. True Non-contact mode obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface.
