Coverage of different detection wavelength ranges for emission analysis and thermal analysis allows easy selection of an analysis technique that matches the sample and failure mode.
Working range of optical stage
| X | 60 mm |
|---|---|
| Y | 60mm |
| Z | 20 mm |
* Working range might be narrower than these values due to the prober being used and interference with the sample stage or mounting of a NanoLens.
* The actual display may differ depending on your software version, environment, etc.
The iPHEMOS-MPX superimposes the emission image on a high-resolution pattern image to localize defect points quickly.
The contrast enhancement function makes an image clearer and more detailed.
Display function
As devices become more complicated, there is increased demand for analysis under an LSI tester connection to find a failure occurring at a specific point while a device is functioning. It is possible to connect an LSI tester with the iPHEMOS-MPX by a short cable and using a probe card adapter specifically designed for the analysis under the iPHEMOS-MPX optics.
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