Failure Analysis, Material Characterization and Metrology Equipment

Tabletop Scanning Electron Microscope

This new generation of the long-standing Hitachi tabletop microscopes (TM) integrates ease of use, optimized imaging, and high-image quality, while maintaining compact design

Emission microscope

The PHEMOS-X is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.

Simultaneous Thermogravimetric Analyzer (DSC-TGA)

STA (simultaneous thermogravimetric analysis) measures DSC and TGA simultaneously in a single unit.

Multifunctional Probe Atomic Force Microscope

The AFM100 Series is Hitachi’s next generation probe microscopy platform.

Ion Milling System

The top of the line ion-milling system for producing exceptional quality cross section or flat-milling samples for electron microscopy.

Ion Milling System

The IM4000Plus Ion Milling System utilizes a broad, low-energy Ar+ ion beam milling method to produce wider, undistorted cross-section milling or flat milling.

The MC1000 Ion Sputter Coater is a sample preparation instrument for use with a Scanning Electron Microscope (SEM) designed to deposit a thin metal coating, such as platinum (Pt), gold (Au), platinum-

SU3800 / SU3900

Scanning Electron Microscope

Hitachi High-Tech’s scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance.

NX5000

Focused Ion and Electron Beam System

Ethos offers powerful solutions integrated into a single platform including low-acceleration Ar/Xe ion-beam processing when configured as a Triple-Beam system.

SU8600

Ultra High Resolution Cold-FESEM

The SU8600 incorporates a highbrightness cold-field emitter (CFE) to allow acquisition of ultra-high-resolution images even at low accelerating voltages.

NEXTA DSC

Differential Scanning Calorimeter

DSC is used to measure heat flow for material characterization by providing thermal properties such as melting point, glass transition and crystallization.

SU9000

Ultra-high Resolution Scanning Electron Microscope

The Cold Field Emission source is ideal for high-resolution imaging with a small source size and energy spread. Innovative CFE Gun technology contributes the ultimate FE-SEM with superior beam bright

SU7000

Scanning Electron Micrscope

The SU7000 is the ultimate high-performance all-rounder: an ultra high resolution Schottky FESEM offering nanoscale imaging and powerful analysis

NEXTA DMA

Dynamic Mechanical Analyzer

Hitachi’s DMA is the perfect tool for assessing both stiff and soft samples, while also capturing rapid modulus changes.

ZONESEMⅡ

Sample Cleaner

The ZONESEMⅡ Tabletop Sample Cleaner uses UV-based cleaning technology to minimize or eliminate hydrocarbon contamination for electron microscopy imaging.

iPHEMOS MPX

Inverted Emission Microscope

The iPHEMOS-MPX is a high-resolution Inverted Emission Microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.

PHI 710

Auger Electron Spectroscopy (AES, SAM)

The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.

nanoTOF II

Time-of-flight Secondary Ion Mass Spectroscope (TOF-SIMS)

PHI’s Latest Generation of TOF-SIMS, having a Modern Ergonomic Package, Smaller Footprint, and Advanced Features

Ultraslice Macrotome

Precision Diamond Saw

Ultraslice Macrotome is a low-cost sectioning system designed for mobile chips, devices, and various industrial samples. This system is known for its precision and versatility.

ULTRAPOL Basic

Manual Lapping & Polishing Machine

ULTRAPOL Basic lapping and polishing machine offers the build-quality required for high precision manual polishing of materials for production, research and NAND flash chip-off in digital forensics

Ultrapol Advance

Flat Lapping and Polishing Machine

ULTRAPOL Advance has been designed to be an all-in-one lapping & polishing workstation for the production of flat surfaces.

ASAP-1

Selected Area Preparation System

ASAP-1® has become the standard preparation equipment that engineers involved in disciplines such as failure analysis, yield enhancement and competitive analysis.

K975X

Turbo-Pumped Thermal Evaporator

The Quorum K975X Turbo-Pumped Thermal Evaporator is a high vacuum evaporator for TEM, SEM and thin film applications.

K850

Critical Point Dryer

The K850 combines versatility and ease of operation. Built-in thermo-electric heating and adiabatic cooling allow precise temperature control.

Q150

Metal/Carbon Sputtering

With options for both oxidizing and non-oxidizing metals, as well as carbon evaporation, Quorum coaters are suitable for applications, including high-resolution SEM and FIB-SEM, ensuring precise resu

Semiconductor Auto Review System

Solution for the review of defects of semiconductor integrated circuit detected by AOI/AVI at front end processing, helps to eliminate false defects and increase overall yield.

Wafer Inspection System

Seiwa Wafer review system visually inspects the defect location detected from AOI systems. This review system is able to capture the visual data and add it to previous inspection results.

IR-2200

Infrared Microscope

IR-2200 Microscope System enables the user to inspect sub-surface images including MEMS device, 3D stacks, incoming wafers, photovoltaic and wafer level CSP’s with an astonishing level of precision.

IS-202

Scanning Acoustic Microscope

The IS-202 Scanning Acoustic Microscope combines highest resolution with a very compact mechanical set-up.

IS 350

Scanning Acoustic Microscope

The Insight-Scan (IS) series of Scanning Acoustic Microscopes(SAM) integrates the finest state-of-the-art technology for high resolution, high speed, fully digital non-destructive sample analysis.

Failure Analysis, Material Characterization and Metrology Equipment

Failure Analysis, Material Characterization and Metrology Equipment

Scanning Electron Microscopes, Transmission Electron Microscopes, Atomic Force Microscopes, Thermal Analyzers, Failure Analysis Systems, Sample Preparation Equipment, Scanning Acoustic Microscopes, Optical Microscopes, X-Ray Photoelectron Spectroscopy, Auger Electron Spectroscopy, and more.

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Failure Analysis, Material Characterization
and Metrology Equipment

Failure Analysis,
Material Characterization
and Metrology Equipment